Quorum Q150T ES Plus: High-Vacuum Combined Sputter Coater and Carbon Evaporator

Quorum Q150T ES Plus: High-Vacuum Combined Sputter Coater and Carbon Evaporator


Introduction to Quorum Q150T ES Plus

The Quorum Q150T ES Plus is a benchmark system in the field of electron microscopy (EM) sample preparation. It is a Combined System that integrates two core functions: Metal Sputter Coating and Carbon Evaporation within a single unit.

Utilizing an integrated turbomolecular pump, the Q150T ES Plus creates a high-vacuum environment (up to 5 x 10-5 mbar). This allows for the coating of oxidizing metals with ultra-fine grain sizes, meeting the stringent requirements of FE-SEM and FIB-SEM.


Key system features

  • Versatile & Flexible: Rapidly switch between Sputtering and Carbon Evaporation heads in seconds via quick-change inserts.
  • High Vacuum Performance: The turbo pump ensures a clean vacuum, ideal for targets such as Chromium (Cr), Iridium (Ir), Tungsten (W), and Platinum (Pt).
  • Intelligent Control: Large capacitive touchscreen with an intuitive graphical interface. The system automatically detects the head type and displays relevant parameters.
  • High Repeatability: Store over 1,000 recipes to ensure consistent coating results across different experimental runs.

Technical specifications

FeatureTechnical Details
Vacuum Pump Type Turbomolecular pump (Turbo)
Ultimate Pressure 5 x 10-5 mbar
Operating Modes Metal Sputtering & Carbon Evaporation (rod/fiber)
Target Materials Cr, Au, Pt, Pd, Ir, W, Al, and more.
Chamber Size Borosilicate Glass Ø150mm x 127mm

Typical research applications

The Q150T ES Plus is an essential tool in materials and nanotechnology laboratories:

  • FE-SEM & FIB-SEM: Creates ultra-thin, grain-less coatings for high-resolution diagnostics.
  • TEM: Carbon evaporation for creating support films on TEM grids.
  • EDX Analysis: Conductive carbon coating that does not interfere with the X-ray spectra of metal samples.

Frequently Asked Questions (FAQ)

Q1: Why do I need a Turbo pump (High Vacuum) instead of a standard rotary pump?
A Turbo pump completely removes water vapor and gaseous impurities, allowing "difficult" materials like Chromium to be coated without oxidation, resulting in a much finer coating.

Q2: Where can I buy consumables (Targets, Carbon rods)?
M TECHNOLOGY provides a full range of genuine Quorum consumables in Vietnam.

Q3: Does the system support film thickness measurement?
Yes, the system supports an optional Film Thickness Monitor (FTM) to control coating thickness in real-time.



Contact & Support

M TECHNOLOGY CO., LTD

VAT code: 0311014975

No 8 Road N8, Mega Ruby Khang Dien, Long Truong Ward, Hochiminh City, 700000, Vietnam.
The North Branch: Floor 1st, CT5 Building, Cat Tuong TNT Apartment, Le Thai To Street,
Vo Cuong Ward, Bac Ninh Province, Vietnam
Phone: +84 28 6288 9639 - +84988.248.156 (Mr Thương)
Email: This email address is being protected from spambots. You need JavaScript enabled to view it.

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