Introduction to Quorum Q150T ES Plus
The Quorum Q150T ES Plus is a benchmark system in the field of electron microscopy (EM) sample preparation. It is a Combined System that integrates two core functions: Metal Sputter Coating and Carbon Evaporation within a single unit.
Utilizing an integrated turbomolecular pump, the Q150T ES Plus creates a high-vacuum environment (up to 5 x 10-5 mbar). This allows for the coating of oxidizing metals with ultra-fine grain sizes, meeting the stringent requirements of FE-SEM and FIB-SEM.
Key system features
- Versatile & Flexible: Rapidly switch between Sputtering and Carbon Evaporation heads in seconds via quick-change inserts.
- High Vacuum Performance: The turbo pump ensures a clean vacuum, ideal for targets such as Chromium (Cr), Iridium (Ir), Tungsten (W), and Platinum (Pt).
- Intelligent Control: Large capacitive touchscreen with an intuitive graphical interface. The system automatically detects the head type and displays relevant parameters.
- High Repeatability: Store over 1,000 recipes to ensure consistent coating results across different experimental runs.
Technical specifications
| Feature | Technical Details |
|---|---|
| Vacuum Pump Type | Turbomolecular pump (Turbo) |
| Ultimate Pressure | 5 x 10-5 mbar |
| Operating Modes | Metal Sputtering & Carbon Evaporation (rod/fiber) |
| Target Materials | Cr, Au, Pt, Pd, Ir, W, Al, and more. |
| Chamber Size | Borosilicate Glass Ø150mm x 127mm |
Typical research applications
The Q150T ES Plus is an essential tool in materials and nanotechnology laboratories:
- FE-SEM & FIB-SEM: Creates ultra-thin, grain-less coatings for high-resolution diagnostics.
- TEM: Carbon evaporation for creating support films on TEM grids.
- EDX Analysis: Conductive carbon coating that does not interfere with the X-ray spectra of metal samples.
Frequently Asked Questions (FAQ)
Q1: Why do I need a Turbo pump (High Vacuum) instead of a standard rotary pump?
A Turbo pump completely removes water vapor and gaseous impurities, allowing "difficult" materials like Chromium to be coated without oxidation, resulting in a much finer coating.
Q2: Where can I buy consumables (Targets, Carbon rods)?
M TECHNOLOGY provides a full range of genuine Quorum consumables in Vietnam.
Q3: Does the system support film thickness measurement?
Yes, the system supports an optional Film Thickness Monitor (FTM) to control coating thickness in real-time.
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