The TRM250 is a thermal analysis imaging microscope for research that incorporates thermal reflection imaging technology developed by a domestic government-funded research institute. It provides excellent thermal imaging resolution by acquiring thermal image information through a high-sensitivity optical microscopy method that measures the distribution of light reflectance changes according to temperature variations on the surface or specific internal surfaces of a sample. As a new technique capable of observing the thermal distribution of a sample with sub-micrometer spatial resolution—which was unattainable with conventional thermal imaging methods—it will serve as a new analytical tool for the thermal analysis of microelectronic circuits.

CTRM750 is an integrated system of confocal microscopy and thermoreflectance microscopy. It provides the
high-resolution confocal 3D profiling image and thermal microscopic image of TRM250 in a single system at
the same viewing position.