Q150TS Plus: High-Resolution Turbomolecular Sputter Coater for SEM

Q150TS Plus: High-Resolution Turbomolecular Sputter Coater for SEM


Introduction to Quorum Q150TS Plus

The Q150TS Plus is a next-generation sputter coating system from Quorum Technologies. Equipped with a powerful turbomolecular pump to achieve high vacuum levels, it is the ideal solution for high-resolution Scanning Electron Microscopy (SEM) applications.

Key Features of Quorum Q150TS Plus

  • Powerful Turbomolecular Pump: Reaches a high vacuum of up to 5 x 10-5 mbar, allowing for the coating of oxidizing metals such as Chromium (Cr) or Iridium (Ir).

  • Ultra-fine Grain Size: Produces a coating with a significantly smaller grain structure, perfect for extreme magnifications.

  • Intelligent Control Interface: Features an intuitive capacitive touchscreen that supports the storage of over 1,000 recipes.

  • High Versatility: Modular design allows for easy exchange of sputter targets and various specimen stages.

  • Data Management: Integrated USB port for software upgrades and exporting process history (log files).


Detailed Specifications

SpecificationDetails
Model Q150TS Plus
Pump Type Turbomolecular pump
Ultimate Vacuum 5 x 10-5 mbar
Specimen Chamber Borosilicate glass (150 mm ID x 127 mm H)
Standard Sputter Target Chromium (Cr) - 57 mm diameter
Specimen Stage Rotation stage, speed 8-20 rpm
Dimensions 585 mm (W) x 535 mm (D) x 410 mm (H)

Typical Applications

  • High-Resolution SEM Imaging: Creates ultra-thin protective layers without losing nano-scale details.

  • FIB-SEM Applications: Deposits a Platinum (Pt) protective layer before Focused Ion Beam (FIB) milling.

  • Oxidizing Materials: Effectively handles metals like Cr, Al, and Ti which require a clean high-vacuum environment.

  • Thin Film Research: Applied in semiconductor materials and optoelectronics research.


Frequently Asked Questions (FAQ)

Why should I choose the Q150TS Plus over budget sputter coaters?

The Q150TS Plus utilizes a Turbo pump to reach a vacuum level 1,000 times deeper than standard rotary vane pumps. This results in a much finer coating and enables the use of specialty metals like Chromium.

Does the Q150TS Plus support biological samples?

Yes. With precise vacuum and temperature control, the system protects the delicate structures of biological specimens during the coating process.

Contact & Support

M TECHNOLOGY CO., LTD

VAT code: 0311014975

No 8 Road N8, Mega Ruby Khang Dien, Long Truong Ward, Hochiminh City, 700000, Vietnam.
The North Branch: Floor 1st, CT5 Building, Cat Tuong TNT Apartment, Le Thai To Street,
Vo Cuong Ward, Bac Ninh Province, Vietnam
Phone: +84 28 6288 9639 - +84988.248.156 (Mr Thương)
Email: This email address is being protected from spambots. You need JavaScript enabled to view it.

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