Introduction to Quorum Q150TS Plus
Key Features of Quorum Q150TS Plus
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Powerful Turbomolecular Pump: Reaches a high vacuum of up to 5 x 10-5 mbar, allowing for the coating of oxidizing metals such as Chromium (Cr) or Iridium (Ir).
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Ultra-fine Grain Size: Produces a coating with a significantly smaller grain structure, perfect for extreme magnifications.
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Intelligent Control Interface: Features an intuitive capacitive touchscreen that supports the storage of over 1,000 recipes.
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High Versatility: Modular design allows for easy exchange of sputter targets and various specimen stages.
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Data Management: Integrated USB port for software upgrades and exporting process history (log files).
Detailed Specifications
| Specification | Details |
|---|---|
| Model | Q150TS Plus |
| Pump Type | Turbomolecular pump |
| Ultimate Vacuum | 5 x 10-5 mbar |
| Specimen Chamber | Borosilicate glass (150 mm ID x 127 mm H) |
| Standard Sputter Target | Chromium (Cr) - 57 mm diameter |
| Specimen Stage | Rotation stage, speed 8-20 rpm |
| Dimensions | 585 mm (W) x 535 mm (D) x 410 mm (H) |
Typical Applications
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High-Resolution SEM Imaging: Creates ultra-thin protective layers without losing nano-scale details.
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FIB-SEM Applications: Deposits a Platinum (Pt) protective layer before Focused Ion Beam (FIB) milling.
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Oxidizing Materials: Effectively handles metals like Cr, Al, and Ti which require a clean high-vacuum environment.
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Thin Film Research: Applied in semiconductor materials and optoelectronics research.
Frequently Asked Questions (FAQ)
Why should I choose the Q150TS Plus over budget sputter coaters?
The Q150TS Plus utilizes a Turbo pump to reach a vacuum level 1,000 times deeper than standard rotary vane pumps. This results in a much finer coating and enables the use of specialty metals like Chromium.Does the Q150TS Plus support biological samples?
Yes. With precise vacuum and temperature control, the system protects the delicate structures of biological specimens during the coating process.Contact & Support

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