TESCAN VEGA COMPACT – Entry-Level Analytical SEM with Wide Field Optics™ & Integrated Essence™ EDS

Introduction to TESCAN VEGA COMPACT
Typical Applications
Key Features
Representative Technical Specifications
FAQ
Overview of TESCAN VEGA COMPACT
Related Video / Webinar
Contact & Support

Introduction to TESCAN VEGA COMPACT

VEGA COMPACT inherits the pedigree of the VEGA series and focuses on efficient, cost-effective analytical workflows. With no mechanical re-alignment needed when switching between imaging and analytical conditions, a single click in Essence™ adjusts beam parameters automatically. Wide Field Optics™ replaces a separate optical camera, providing a live SEM overview at magnifications down to 2× for intuitive navigation over large samples.

Typical Applications

QA/QC & manufacturing: routine inspection, failure analysis, and process monitoring.
Metals & alloys: porosity, grain size, and microstructure via SE/BSE; rapid EDS checks.
Particles & powders: morphology and size assessment at low and high kV.
Geoscience: petrography and mineral phase mapping; complementary CL options.
General R&D labs: cost-effective analytical SEM for broad materials characterization.

Key Features

Imaging & Analysis in One Window

Essence™ EDS (fully integrated): spectra, maps, and line scans directly in the live SEM window; results linked to stage coordinates.
One-click switching between low-current imaging and high-current analytical conditions.

Intermediate Lens™ & In-Flight Beam Tracing™

Electromagnetic aperture control optimizes spot size across probe currents and delivers the required landing current.
Maintains SNR and resolution under analytical conditions.

Wide Field Optics™ Navigation

Live SEM overview at 2× magnification with exceptional depth of focus—no optical navigation camera needed.
Accurate navigation on pre-tilted/EBSD holders with scanning-tilt correction.

Essence™ Software & Safety

Intuitive, modular UI with quick search, presets, multi-user layouts, undo/redo.
Essence™ 3D Collision model visualizes chamber geometry and predicts movements to protect retractable BSE and other detectors.

Operational Efficiency

High-vacuum operation (~10⁻³ Pa class) for uncompromised EDS results.
Optional vacuum buffer to reduce rotary pump run-time (ecological and economic benefits).

Representative Technical Specifications

Specification	Value (representative)
Electron source	Tungsten heated cathode
Accelerating voltage	200 eV – 30 keV
Probe current	1 pA – 2 µA (continuously adjustable)
Resolution (SE/BSE)	SE: 3 nm @ 30 keV; 8 nm @ 3 keV • BSE: 3.5 nm @ 30 keV
Magnification	2× – 1,000,000×; field of view >14 mm @ WD=15 mm
Vacuum	High vacuum (~10⁻³ Pa); optional vacuum buffer
Detectors	SE (E-T), 4Q BSE (manual retract), pA meter with touch alarm
Integrated EDS	30 mm² detector, 129 eV @ Mn Kα, 1 Mcps input / 300 kcps output

*Specifications may vary depending on configuration and installed options.

FAQ

How does VEGA COMPACT accelerate everyday analytical work?
By combining SEM imaging and fully integrated Essence™ EDS in one live window with single-click switching between imaging and analytical conditions.

Do I need an optical camera for navigation?
No. Wide Field Optics™ provides a live SEM overview at 2× magnification for intuitive navigation without a separate optical camera.

How are detectors protected during movement?
Essence™ 3D Collision model predicts stage and accessory motions in real time to help prevent collisions with chamber-mounted detectors.

Overview of TESCAN VEGA COMPACT

TESCAN VEGA COMPACT delivers a practical balance of performance, simplicity, and cost efficiency. Its aperture-less optics, Intermediate Lens™ with In-Flight Beam Tracing™, Wide Field Optics™, and Essence™ EDS integration provide an efficient path to reliable morphological and compositional data for industrial and research labs.