The TESCAN VEGA3 is a versatile tungsten thermionic emission SEM system intended for both high- and low-vacuum operations. VEGA3 is equipped with modern electron optics based on a unique four-lens Wide Field Optics™ design with a proprietary intermediate lens. This feature enables a variety of imaging modes with valuable capabilities.

The modes are Resolution, Depth, Field, Wide Field, Channeling. The operation is very easy and switching between the different imaging modes is straightforward and fast as they are fully automated. The TESCAN In-Flight Beam Tracing™ technology optimizes all the parameters of the electron beam. This is assured by a continual aperture optimization which ensures minimum possible spot size over whole range of electron currents. The calculation of the optimal parameters is done in-flight every time a change in operating conditions is made thus maximizing beam performance. VEGA3 has a wide variety of ports, a choice of up to 4 different chamber sizes and optimized geometry for EDX, WDX and EBSD, including multiple detector systems. Robust stage with maximum sample height bearing up to 8 Kg depending on the chamber configuration. The extended low-vacuum mode allows imaging on non-conductive samples including biological specimens. VEGA3 is an excellent choice for those looking for a reliable and fully functional entry-level SEM system with a great price-to-performance ratio.

Key features

  • Unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimization
  • The proprietary Intermediate Lens (IML) that works as an "Aperture Changer" makes the exchange of the effective final aperture in an electromagnetic way
  • Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well-established software Electron Optical Design
  • The column construction, without any mechanical centring elements, enables fully automated column set-up and alignment
  • High-throughput large-area automation, e.g. automated particle location and analysis Superior specimen handling using a fully motorized Compucentric stage


  • Ideal geometry for EDX, WDX, EBSD; non-distorted EBSD pattern
  • Fast and easy obtaining of the clean chamber vacuum by powerful turbomolecular and rotary fore vacuum pump
  • Fully automated microscope set-up including electron optics set-up and alignment
  • Sophisticated software for SEM control, image acquisition, archiving, processing and analysis; multi-user environment localized in many languages
  • Network operations and built-in remote access/diagnostics, all come as the TESCAN standard
  • Unique live stereoscopic imaging utilizing the 3D Beam Technology

TESCAN VEGA3 Microscope

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