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AFM brings new inside-to-SEM method of characterisation, enabling the analysis of a broad range of properties:
Material mechanical properties
- topography
- local elastic properties (tapping & contact mode)
- local sample hardness (non-topographic)
- depth-dependent material characterization
- various in-situ operations
Material magnetic properties
- magnetic domain imaging
Material electro-mechanical properties
- piezoelectric domain imaging
Material electrical properties
- conductivity map (including insulated areas)
- local surface potential
- local electrical properties (non-topographic)
- sub-nanometer topography
LiteScope setup
Benefits of AFM-in-SEM solution
Complex and correlative sample analysis
Cutting-edge CPEM technology allows the simultaneous acquisition of AFM and SEM data and their seamless correlation.
In-situ sample characterization
In-situ conditions inside the SEM ensure sample analysis at the same time, in the same place and under the same
Precise localization of the region of interest
Extremely precise and timesaving approach uses SEM to navigate the AFM tip to the region of interest, enabling its fast & easy localization.
Technical specification
| Dimensions XYZ | 118 mm x 84 mm x 35.7-48.4 mm | Scan range in open loop XYZ (±10%) | 100 μm x 100 μm x 20 μm |
| Total weight | 460 g | Scan range in closed loop XYZ | 80 μm x 80 μm x 16 μm |
| Vacuum working range | 105 Pa to 10-5 Pa | Resolution XYZ up to | 0.1 nm x 0.1 nm x 0.02 nm |
| Operating temperature | +10 °C to +35 °C | Maximum sample height | 8 mm |
| Maximal scanned sample area XYZ | 21 mm x 11 mm x 8 mm | Maximum sample weight | 100 g |